Dielectric barrier discharge lamp

摘要

There is provided a dielectric barrier discharge lamp device which allows ultraviolet rays to be uniformly radiated onto a workpiece having a large surface area and which can be easily adapted to the size of workpiece. In the dielectric barrier discharge lamp device of the present invention at least one dielectric barrier discharge lamp is arranged in a hermetically sealed casing, said casing comprising a hollow longitudinally extending main part being closed at both ends by end parts, at least a portion of said main part of the casing defining a window allowing light radiated from the at least one dielectric barrier discharge lamp to pass therethrough onto the workpiece. At least one end part of the casing is provided with a passage allowing inert gas to be introduced into the casing, and at least one end part of the casing is adapted such as to allow loading or unloading of the at least one dielectric barrier discharge lamp. A plurality of casings are arranged side by side with their windows facing the workpiece to be irradiated.