发明名称 Method of processing a workpiece
摘要 <p>A workpiece is processed which includes a multiplicity of recesses formed in the exposed surface. The invention includes depositing a first barrier layer 13 of for example, titanium nitride, a second layer 11 of aluminium alloy and a third relatively thin layer 12 of titanium nitride and then exposing the sandwich of layers to elevated heat and pressure so that the second layer is deformed to fill the recesses 10.</p>
申请公布号 GB2317498(B) 申请公布日期 2001.05.16
申请号 GB19970019119 申请日期 1997.09.10
申请人 * TRIKON EQUIPMENTS LIMITED 发明人 PAUL * RICH;DAVID JOHN * THOMAS
分类号 C23C14/22;C23C14/04;C23C14/58;H01L21/28;H01L21/3205;H01L21/768;H01L23/52;H01L23/522;(IPC1-7):H01L21/768 主分类号 C23C14/22
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