COATING LIQUID FOR FORMING SILICA-BASED FILM

摘要

PROBLEM TO BE SOLVED: To provide a coating liquid for forming a silica-based film not suffering troubles caused by gas evolution in a thermal treatment, having excellent shalf stability and exhibiting excellent planarity sufficient to cope with formation of a fine circuit pattern. SOLUTION: The coating liquid for forming a silica-based film is composed of a solution containing an acid-catalyzed hydrolyzate of a trialkoxysilane in an alkyleneglycol dialkyl ether and comprises a film-forming component which after removing of a solvent exhibits an increase in its weight in the thermogravimetry and has no peak due to an alkoxy group near 3,000 cm-1 in the IR spectrum.