FUNCTIONAL MATERIAL MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To deposit fine particles of high purity having single grain size and uniform structure which are manufactured in a less polluted or damaged condition on a substrate. SOLUTION: The time particles classified into desisted grain sizes are recovered on the substrate 111, a substance generated by radiating laser beams 103 on a medium 107 is recovered on the substrate 111 to deposit the classified particles and the substance generated by radiating the laser beam on the medium on the same substrate 111.