METHOD FOR PRODUCTION OF PIEZOELECTRIC OR FERROELECTRIC THIN FILM

摘要

PROBLEM TO BE SOLVED: To solve the problem where it is difficult to control the crystal orienta tion when producing through a post annealing technique typified by a sol-gel method a piezoelectric or ferroelectric thin film. SOLUTION: In a process for drying a raw material solution, substrate heating is conducted under a condition represented by the formula 350<=T<=405t-5t (wherein T deg.C is the highest temperature in heating the substrate; and (t) min is >0 and a heating time at T deg.C).