发明名称 |
Valve closure seating method and apparatus |
摘要 |
A micro-mass flow controller (10) has a sonic choked flow restriction (28) with an oscillatable valve (26) for repetitiously opening and closing the sonic choked flow restriction (28) in a time-modulated sequence to set or vary mass flow rate of gas through the sonic choked flow restriction (28) over a period of time to something between no flow and maximum mass flow rate. A bimorph piezoelectric actuator (40) is coated in a sputtered dielectric layer (78) and then encapsulated in stainless steel or other metal cladding (80). A closure member (46) on the actuator (40) is registered to a valve seat (70) by actuating the actuator (40) to force the closure member (46) in a puddle of adhesive (86) against the valve seat (70) until the adhesive (86) cures. |
申请公布号 |
US6230731(B1) |
申请公布日期 |
2001.05.15 |
申请号 |
US20000607301 |
申请日期 |
2000.06.30 |
申请人 |
ENGINEERING MEASUREMENTS COMPANY |
发明人 |
MILLER CHARLES E.;YOSHIDA LOUIS T.;STEINBACH MICHAEL |
分类号 |
F16K31/02;F16K31/00;G05D7/06;(IPC1-7):E16K37/02 |
主分类号 |
F16K31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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