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发明名称
Siliziumhalbleitersubstrat und Verfahren zu dessen Herstellung
摘要
申请公布号
DE19983188(T1)
申请公布日期
2001.05.10
申请号
DE19991083188T
申请日期
1999.04.30
申请人
NIPPON STEEL CORP., TOKIO/TOKYO
发明人
IKARI, ATSUSHI;HASEBE, MASAMI;NAKAI, KATSUHIKO;SAKAMOTO, HIKARU;OHASHI, WATARU;HOSHINO, TAIZO;WASAKI, TOSHIO;HATTA, MIKIO
分类号
C30B15/00;H01L21/322;(IPC1-7):C30B29/06
主分类号
C30B15/00
代理机构
代理人
主权项
地址
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