Vacuum unit for adsorption pads, has path connected to compressed air supply port, path connected in vacuum port, and path connected in exhaust port for solenoid valves that are arranged in parallel

摘要

A path (48) connected to a compressed air supply port (36), a path (64) connected in a vacuum port (62), and a path connected in the exhaust port for solenoid valves (38) are arranged in parallel with each other. The solenoid valves (22,24), flow adjusting screw (114), suction filter (94), and a vacuum pressure switch (96) are sequentially and serially arranged to a main body (20).