发明名称 SUBSTRATE WITH FEEDTHROUGH AND METHOD FOR MANUFACTURING THE SAME
摘要 <p>A substrate used for a package of a microdevice has flat front and back surfaces and a wiring extending between the surfaces and conduct electricity between the surfaces through the wiring.</p>
申请公布号 WO0132555(A1) 申请公布日期 2001.05.10
申请号 WO2000JP07556 申请日期 2000.10.27
申请人 JAPAN SCIENCE AND TECHNOLOGY CORPORATION;ESASHI, MASAYOSHI 发明人 ESASHI, MASAYOSHI
分类号 B81C99/00;H01L21/48;H01L21/68;H05K1/11;H05K3/06;H05K3/40;(IPC1-7):B81C5/00 主分类号 B81C99/00
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