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发明名称
摘要
申请公布号
JP3163347(B2)
申请公布日期
2001.05.08
申请号
JP19920208685
申请日期
1992.08.05
申请人
发明人
分类号
H01L21/203;C30B23/02;C30B25/16;H01L21/205;H01L21/302;(IPC1-7):H01L21/205
主分类号
H01L21/203
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