| 摘要 |
<p>PROBLEM TO BE SOLVED: To smooth the flow rate and the pressure of off-gas supplied to a load. SOLUTION: At the first period t1-t2 large in flow rate and high in pressure, high pressure off-gas from a PSA device 19 is stored at a second tank T2 by opening a second stop valve V2 while closing a first stop valve V1 and supplied to the load from a pressure control valve V3 through a first tank T1. At the second period t1-t6, the off-gas from the PSA device 19 is supplied to the load through the first stop valve V1 and the first tank T1 while closing the second stop valve V2. During the second period, at each period t2-t6 at which the off-gas from the PSA device is not enough, the off-gas stored at the second tank T2 through the pressure control valve V3 is supplied to the first tank T1.</p> |
