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发明名称
摘要
申请公布号
JP3164149(B2)
申请公布日期
2001.05.08
申请号
JP19970224947
申请日期
1997.08.21
申请人
发明人
分类号
H01L27/04;G05F3/26;H01L21/822;H03M1/10;H03M1/74;(IPC1-7):G05F3/26
主分类号
H01L27/04
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