| 摘要 |
PURPOSE: A thin film transistor substrate for liquid crystal display and its manufacturing method are provided to make it easy to form a contact hole of a color filter and simplify the manufacturing process by utilizing a black matrix. CONSTITUTION: Firstly, a gate wiring(24,26,28) including a gate line, a gate electrode(26) and a gate pad(24) is formed on an insulating substrate(100) and a gate insulating layer covers the gate wiring(24,26,28). Then, a semiconductor layer and an ohmic contact layer(55) are formed on the gate insulating layer, and a source electrode(65), a drain electrode(66) and a data wiring including a data line(62) connected with the source electrode(65) and a data pad(64). Then, an interlayer dielectrics(ILD) covering the data wiring is formed on the data wiring(64,65,66) and the gate wiring(24,26,28), a red, a green and a blue color filters(81,82,83) are formed on the ILD by using a printing method or a laser transfer method and a passivation layer(90) is laminated on the color filters(81,82,83) and the ILD. Then, respective contact holes(91,92,93,94) are formed on the drain electrode(66), the gate pad(24) and the data pad(64) by patterning the passivation layer(90) and the respective contact holes(91,92,93,94) to expose the drain electrode(66), the gate pad(24) and the data pad(64) are completed by removing the color filters(81,82,83) exposed through the contact holes(91,92,93,94) by using the passivation layer(90) as an etch mask. Lastly, a pixel electrode(112), an auxiliary gate pad(114) and an auxiliary data pad(116) connected with the drain electrode(66), the gate pad(24) and the data pad(64) respectively through the contact holes(91,92,93,94) are formed on the passivation layer(90).
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