| 摘要 |
PURPOSE: An air leakage sensing device for a lock pin actuating system is provided to set a lock pin actuating interlock by mounting sensors to a lock pin for stopping or holding a next wafer handling sequence in case of the malfunction of the lock pin, thereby minimizing the loss of wafers. CONSTITUTION: An air leakage sensing device for a lock pin actuating system includes sensors(S1,S2) for sensing the leakage of air generated in a hose in case of the up/down of a lock pin for moving handlers(214,224) to output an air leakage state signal to a pneumatic control part(240), thereby setting a lock pin actuating interlock for stopping or holding a next wafer handling sequence in case of the malfunction of a lock pin, wherein the sensor are incorporated in handler brake actuators(210,220).
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