| 摘要 |
PURPOSE: A spin scrubber stops washing process when the driving force of a motor is not normally transmitted to a brush to prevent a wafer from being damaged therein. CONSTITUTION: A spin scrubber(10) comprises a motor(22), a brush(26), a belt(24), a sensor part and a control part(30). The belt(24) has detecting marks(60a, 60b) with constant spaces between them. The sensor part is comprises a first and a second sensor(70a, 70b) and installed near the belt(24) to detect the rotation of the belt(24) and generate detecting signals(DS1, DS2). The control part(30) stops the washing process of the brush(26) when either of the detecting signals(DS1, DS2) is not transmitted.
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