发明名称 |
APPARATUS FOR TESTING SEMICONDUCTOR PRODUCT |
摘要 |
PURPOSE: An apparatus for testing a semiconductor product is to provide objective data, by objectively testing adhesion of a chip-on-board adhered to a base substrate. CONSTITUTION: A transfer unit which transfers in a vertical direction regarding a base plate(40) is installed in a transfer body fixed in the base plate. A test unit(20) performs a test of a semiconductor product while being vertically transferred by the transfer unit, installed in the transfer body. A semiconductor product fixing unit is capable of moving on an upper surface of the base plate while the semiconductor product being tested is fixed by the test unit. A fixing unit guide frame(60) confines movement of the semiconductor product fixing unit, and guarantees at least a position to be tested of the semiconductor product by the test unit while the semiconductor product fixing unit is moving.
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申请公布号 |
KR20010036645(A) |
申请公布日期 |
2001.05.07 |
申请号 |
KR19990043750 |
申请日期 |
1999.10.11 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KO, SEOK |
分类号 |
H01L21/66;(IPC1-7):H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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