发明名称 APPARATUS FOR TESTING SEMICONDUCTOR PRODUCT
摘要 PURPOSE: An apparatus for testing a semiconductor product is to provide objective data, by objectively testing adhesion of a chip-on-board adhered to a base substrate. CONSTITUTION: A transfer unit which transfers in a vertical direction regarding a base plate(40) is installed in a transfer body fixed in the base plate. A test unit(20) performs a test of a semiconductor product while being vertically transferred by the transfer unit, installed in the transfer body. A semiconductor product fixing unit is capable of moving on an upper surface of the base plate while the semiconductor product being tested is fixed by the test unit. A fixing unit guide frame(60) confines movement of the semiconductor product fixing unit, and guarantees at least a position to be tested of the semiconductor product by the test unit while the semiconductor product fixing unit is moving.
申请公布号 KR20010036645(A) 申请公布日期 2001.05.07
申请号 KR19990043750 申请日期 1999.10.11
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KO, SEOK
分类号 H01L21/66;(IPC1-7):H01L21/66 主分类号 H01L21/66
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