发明名称 VACUUM CIRCUIT FOR A DEVICE FOR TREATING A RECEPTACLE WITH LOW PRESSURE PLASMA
摘要 The invention relates to a device for treating a receptacle (30) with a low pressure plasma, comprising at least one treatment station (14) consisting of a fixed cavity (32) which is connected by a vacuum circuit (74) to a depressurizing source, and wherein said treatment station (14) consists of a moveable cover (34) provided with means for supporting (54) the receptacle (30) in such a way that the receptacle in introduced into the cavity (32) by displacing the cover (34). The invention is characterized in that the cover (34) comprises a connecting channel (64) which enables the cavity (32) to communicate with a fixed end (69) of the vacuum circuit when the cover (34) is in a position in which the cavity is hermetically sealed.
申请公布号 WO0131680(A1) 申请公布日期 2001.05.03
申请号 WO2000FR02941 申请日期 2000.10.23
申请人 SIDEL ACTIS SERVICES 发明人 RIUS, JEAN-MICHEL
分类号 H05H1/46;B65D1/00;B65D25/02;C23C16/04;C23C16/455;C23C16/50;C23C16/505;H01J37/32;(IPC1-7):H01J37/32 主分类号 H05H1/46
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