Micro-mirror device

摘要

A micro-mirror device includes a substrate (21), address electrodes (30) provided on the substrate, and a micro-mirror (51) disposed to face the substrate (21) and to be spaced a predetermined distance from the substrate (21); and is adapted so that the slope of the micro-mirror (51) can be adjusted by electrostatic attraction forces between the address electrodes (30) and the micro-mirror (51). The micro-mirror device includes auxiliary electrodes (40) which are formed on and projected from the substrate (21) and the upper portions of which are disposed in the vicinity of the micro-mirror (51) so that distances between the micro-mirror (51) and the auxiliary electrodes (40) can remain narrow even when the micro-mirror (51) is inclined by electrostatic attraction forces in one direction, and the micro-mirror (51) can be restored by electrostatic attraction forces of the auxiliary electrodes when restored.