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发明名称
SPECTROSCOPIC ELLIPSOMETER
摘要
申请公布号
EP1095259(A1)
申请公布日期
2001.05.02
申请号
EP19990938722
申请日期
1999.07.08
申请人
VERITY INSTRUMENTS, INC.
发明人
FLUCKIGER, DAVID, U.;KUENY, ANDREW, W.
分类号
G01J4/04;G01N21/21;(IPC1-7):G01N21/21
主分类号
G01J4/04
代理机构
代理人
主权项
地址
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