| 摘要 |
(A) The surface shape of an object (1) is measured by varying the position and/or direction of measurement, and a plurality of sets of partially measured data (2) including the common parts (2a) are acquired, (B) for all the partially measured data (2), the overlapped ranges (3a) of the adjacent common parts (2a) are determined within the measurement error ranges (3), (C) when there are no superposition ranges (3a), it is decided that a combination is not possible, and (D) when there are overlapped ranges (3a), the common parts of each set of partially measured data are combined within the ranges. Thus, combined data can be created at a high accuracy from a plurality of sets of partially measured data based on a small number of repeated calculations. <IMAGE> |
