| 摘要 |
An optical apparatus includes an optical system having optical elements, an enclosure, enclosing the optical system, for keeping a gas-tight environment inside the enclosure, and a pressure absorber which absorbs variations in differential pressure between the inside and the outside of the enclosure, while maintaining the gas-tight environment in the enclosure during at least one of transportation and storage of the optical apparatus. The optical system is one of a projection optical system and an illumination optical system of an exposure apparatus, and the inside of the enclosure is filled with one of an inert gas and a low-oxygen content gas.
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