TABLE POSITIONING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a table positioning apparatus capable of preventing offsetting which may occur when a moving table is clamped after being positioned. SOLUTION: The table positioning apparatus 1 has the moving table 4 freely movably placed on a fixed table 2 and moved by three servo drive mechanisms 5A to 5C. Based on information about positions sensed by three position sensors 6A to 6C, each servo drive mechanism is controlled to allow the moving table to move to a desired position. Four clamping mechanisms 8A to 8D are driven on arrival of the moving table 4 at the desired position so that a clamping force applied to the moving table 4 increases gradually. Meanwhile, control for positioning of the moving table 4 is carried out. When a firm clamping condition is attained, the moving table is accurately positioned at the desired position without offsetting.