| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card pin that has sufficient characteristics, especially sufficient wear resistance and spring properties, even if the dimensions are set to extremely small values and has small increase in contact resistance values even if the card pin is used for a long time. SOLUTION: The base material of the probe card pin is made of a nickel tungsten alloy. By controlling a tungsten ratio to 5-30 wt.% and setting at least one portion of a metal organization to nano crystal structure, wear resistance can be further improved. Further, in the present invention probe card pin, the cross section of a drum part 1 is set to a square or rectangular shape, thus extremely improving bending strength (spring property). Also, a wedge- shaped tip part 3 is formed at the tip side of the probe card pin via a tapered part 2.
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