| 摘要 |
PROBLEM TO BE SOLVED: To obtain a cleaner for lithography having increased solvent power to a resist, etc., and high safety. SOLUTION: The cleaner for lithography uses one or more solvents selected from the group comprising 1,3-propanediol alkyl ethers, 1,3-propanediol alkyl ether acetates, 1,3-propanediol dialkyl ethers and 1,3-propanediol diacetate optionally in combination with a 1-4C alcohol or propylene glycol methyl ether acetate. |
