LAMINATED POLYESTER FILM FOR VERY THIN LINE PHOTORESIST

摘要

PROBLEM TO BE SOLVED: To obtain a laminated polyester film for a very thin line photoresist as a substrate having both transparency and lubricity on which a photoresist layer excellent in surface and edge pattern forming property can be formed. SOLUTION: The laminated polyester film is a biaxially oriented laminated polyester film obtained by laminating at least two polyester compositions, contains <=80 ppm inert particles having 0.01-5.0 μm average particle diameter in a surface layer on at least one side and has <=80 ppm inert particle content of the entire laminated polyester film and <=1.0% haze of the film.