发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF AND MOLD DEVICE
摘要 PROBLEM TO BE SOLVED: To realize an easy switching of kind in a sealing process as well as a high throughput. SOLUTION: A carrier tape 60 on which a semiconductor pellet 63 is mounted is spanned between a delivery reel 51 and a take-up reel 52 so that it passes between an upper mold 10 and a lower mold 20 as well as a gate brake presser 31 provided behind them and a gate brake stage 30. It is moved in synchronous with clamping and mold-releasing between the upper mold 10 and lower mold 20, so that a series of molding operations such as resin-sealing of a semiconductor pellet 63 with a cavity 22a between the upper mold 10 and the lower mold 20 and gate brake thereafter, etc., are continuously performed. A plurality of mold modules each of which has the above configuration are operated in parallel under a master module.
申请公布号 JP2001118866(A) 申请公布日期 2001.04.27
申请号 JP19990294699 申请日期 1999.10.18
申请人 HITACHI LTD 发明人 KAWADA YOICHI;IWAMOTO TAKAFUMI;KURATOMI BUNJI
分类号 H01L21/60;H01L21/56;(IPC1-7):H01L21/56 主分类号 H01L21/60
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