| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing for high quality liquid crystal display substrates for inspection with neither admixture of air bubbles nor gap non-uniformity disturbing recognition of defects and the assembling device in the liquid crystal display substrates used for evaluation of a manufacturing process of the liquid crystal display substrates. SOLUTION: Superposing and pressurizing of substrates to be inspected 1, on which spacers 21 are sprayed and a liquid crystal 23 is dropped, are carried out in the reduced pressure atmosphere. Elastic plates for pressurizing 17, 19 are attached to a table and uniform pressurizing is carried out utilizing pressure difference in a vacuum chamber. The method of manufacturing includes dropping the liquid crystal 23 on the peripheral part of the substrates 1, superposing the substrates 1 with each other in the reduced pressure atmosphere and subsequently leaving them in the atmosphere so as to spread the liquid crystal over the full surface. Because transfer of defective TFT(thin film transistor) and CF(color filter) substrates to a panel assembling process is dispensed with, reduction of the manufacturing cost and improvement of the yield are obtained.
|
