PLANAR MAGNETRON SPUTTERING APPARATUS

摘要

A magnet assembly for magnetron sputtering includes a base pole member (14) defining a plane and formed of magnetically permeable material. A center primary magnet (16) is positioned on the base pole member and has its north-south magnetic orientation extending substantially perpendicular to the plane of the base pole member. An outer primary magnet (26) is positioned on the pole member and has a north-south magnetic orientation extending substantially perpendicular to the plane of the base pole member and in a direction opposite to the magnetic orientation of the center primary magnet. A center secondary magnet (20) is positioned between the center primary magnet and the outer primary magnet and has a north-south magnetic orientation extending substantially perpendicular to the plane of the base pole member and in a direction opposite to the magnetic orientation of the center primary magnet.