OPTICAL COMPONENT HAVING POSITIONING MARKERS AND METHOD FOR MAKING THE SAME

摘要

The fabrication of an optical component comprising an optical waveguide and positioning marker on a same substrate is facilitated, and the yield of the fabrication process for such an optical component is increased. By forming t he core segment of the optical waveguide and the positioning marker in a same step, the positional accuracy between the core segment and the positioning marker can be improved without requiring a high level of expertise or expensive equipment such as a photographic exposure device. In the optical component comprising an optical waveguide and positioning marker on a substrate, the positioning marker is provided with rounded corners or a curv ed profile whereby it is possible to avoid the stress concentration which would otherwise develop due to the difference in thermal expansion between the various layers at the time of thermal processing, and the cracks which would otherwise develop in the positioning marker and the surrounding layers.