| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring instrument which can measure the three-dimensional shape of an arbitrary part on the top surface of a measured object irrelevantly to the external shape of the measured body. SOLUTION: This three-dimensional shape measuring instrument takes a three-dimensional measurement by moving a measured body 5 along a (y) axis by a slide table 13 while fixing the measured body to the tip part 17a of a rod type support arm 17 and then scanning the measured body 5 with slit light 27. The support arm 17 is driven and rotated by a rotary driving mechanism 21, and then a displacement sensor 23 can be adjusted in the image pickup direction wherein an image of the measured body 5 is picked up.
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