| 摘要 |
PROBLEM TO BE SOLVED: To increase mass productivity in a method for manufacturing an ink jet head that comprises an actuator section having an individual electrode and a piezoelectric element and a pressurizing chamber component having a pressurizing chamber. SOLUTION: A plurality of small-sized substrates 20 are prepared. Films of an individual electrode material 21, a piezoelectric material 22, an adherence layer material 23, a material 24 for a diaphragm, and a common electrode and an intermediate layer material 25; are sequentially formed on each of the substrates 20. A plurality of opening holes 1 are formed on a large-sized substrate 30. After that, each material 24 for the diaphragm and common electrode of the plurality of substrate 20 having the films provided thereon is bonded to the substrate 30 having the opening holes 1 for the pressurizing chamber formed thereon with an adhesive 14 adhered thereto by an electrodeposition method. Next, the individual electrode material 21 and piezoelectric material 22 on the substrate 20 are etched so that a individual electrode 3 and a piezoelectric element 10 are divided to be separated at a predetermined position on the upper portion of each opening 1 for pressurizing chamber.
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