| 摘要 |
The present invention relates to a semiconductor device processing and sorting apparatus in which a plurality of semiconductor devices is tested simultaneously. According to the present invention the apparatus comprises inclined guideways for guiding the semiconductor devices, each inclined guideway having a sliding surface for sliding semiconductor devices therealong by gravitation, the semiconductor devices being arranged on the guideway so that their smallest dimension is transverse to the sliding surface, the inclined guideways including an input guideway for guiding semiconductor devices into the apparatus; testing guideways for guiding semiconductor devices to predetermined testing positions, said testing guideways being spaced in the direction transverse to their sliding surface; and sorting guideways for guiding semiconductor devices of different sort groups into respective containers; a loading means for placing a container of a plurality of containers for semiconductor devices in a position for unloading the semiconductor devices from a container into the input guideway; a distributing means for distributing the semiconductor devices from the input guideway to the testing guideways; a testing means for simultaneously testing a plurality of semiconductor devices at predetermined testing positions; a sorting means for receiving the tested semiconductor devices from the testing guideways and moving each tested semiconductor device according to its test results to a respective sorting guideway; and a discharge means for placing a container of a plurality of containers for semiconductor devices in a position for loading semiconductor devices of each sort group into the respective container. The apparatus has a very high throughput, an improved soak chamber, accelerated sorting facilities and multiple sort output while occupying a reduced floor space. |
