发明名称 |
FERROELECTRIC CAPACITOR AND SEMICONDUCTOR DEVICE HAVING THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To reduce the occurrence of a defect in a ferroelectric film in a semiconductor device having a ferroelectric capacitor. SOLUTION: An anti-oxidizing film, which is formed between a semiconductor element part formed by a reduction action and a ferroelectric capacitor formed in an oxide atmosphere, is formed with a composition allowing the passage of Pb.
|
申请公布号 |
JP2001110998(A) |
申请公布日期 |
2001.04.20 |
申请号 |
JP19990285751 |
申请日期 |
1999.10.06 |
申请人 |
FUJITSU LTD |
发明人 |
INOUE KENICHI;TAKAI KAZUAKI |
分类号 |
H01L27/105;H01L21/8242;H01L21/8246;H01L27/10;(IPC1-7):H01L27/10;H01L21/824 |
主分类号 |
H01L27/105 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|