发明名称 FERROELECTRIC CAPACITOR AND SEMICONDUCTOR DEVICE HAVING THE SAME
摘要 PROBLEM TO BE SOLVED: To reduce the occurrence of a defect in a ferroelectric film in a semiconductor device having a ferroelectric capacitor. SOLUTION: An anti-oxidizing film, which is formed between a semiconductor element part formed by a reduction action and a ferroelectric capacitor formed in an oxide atmosphere, is formed with a composition allowing the passage of Pb.
申请公布号 JP2001110998(A) 申请公布日期 2001.04.20
申请号 JP19990285751 申请日期 1999.10.06
申请人 FUJITSU LTD 发明人 INOUE KENICHI;TAKAI KAZUAKI
分类号 H01L27/105;H01L21/8242;H01L21/8246;H01L27/10;(IPC1-7):H01L27/10;H01L21/824 主分类号 H01L27/105
代理机构 代理人
主权项
地址