发明名称 NON-VOLATILE MEMORY AND METHOD FOR FABRICATING THE SAME
摘要 PURPOSE: A non-volatile memory and a method for fabricating the same are provided to lower a voltage applied to an erasing gate by using a vector sum of a bit line and an erasing gate. CONSTITUTION: An isolation layer(32) is formed in a predetermined interval on a semiconductor substrate(31). A bit line(33) is formed on the semiconductor substrate(31) including the isolation layer(32). The bit line(33) is located on a multitude of line of a vertical direction of the isolation layer(32). A buried n+ layer(35) for bit line is buried into the semiconductor substrate(31) between the isolation layers(32). The buried n+ layer(35) for bit line is contacted with a lower side of the bit line(33). A floating gate(36) is formed by inserting a gate oxide layer(34) into one side between the isolation layers(32). A control gate(38) is formed by inserting an interlayer dielectric(37) into an upper side of the floating gate(36). An erasing gate(41) is formed by inserting a gap gate oxide layer(39) and the second insulating layer sidewall on upper sides of the control gate(38) and the floating gate(36).
申请公布号 KR100294693(B1) 申请公布日期 2001.04.19
申请号 KR19980004637 申请日期 1998.02.16
申请人 HYUNDAI MICRO ELECTRONICS CO., LTD. 发明人 KIM, DONG SEON
分类号 H01L27/115;(IPC1-7):H01L27/115 主分类号 H01L27/115
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