DEVICE FOR ULTRASONIC REMOVAL

摘要

PROBLEM TO BE SOLVED: To provide an ultrasonic removal device for surely removing a resist at a high speed without necessitating a complicated structure and circulation of a large amount of peeling liquid. SOLUTION: An upper surface removal liquid 16 is jetted from an upper surface peeling liquid jetting nozzle 14 toward a glass substrate 11 on the upper surface of which a resist is formed. A lower surface peeling liquid jetting nozzle 17 is disposed at the position opposite to the nozzle 14 while interposing the substrate 11 to jet a lower surface peeling liquid 19 to the lower surface of the substrate 11. An ultrasonic vibrating element 20 is arranged in the nozzle 17 to impart an ultrasonic wave to the liquid 19. A gas supply pipe 13 is connected to the nozzle 14 to mix air bubbles in the liquid 16 by supplying air to the liquid 16.