发明名称 |
Surface acoustic wave resonator, filter, duplexer and communication apparatus |
摘要 |
A surface acoustic wave resonator includes a piezoelectric substrate and an interdigital transducer disposed thereon. The surface acoustic wave resonator operates using a shear horizontal wave, and the interdigital transducer includes an electrode film made of a metal containing W or Ta as its main component and a thin film made of Al.
|
申请公布号 |
US6218763(B1) |
申请公布日期 |
2001.04.17 |
申请号 |
US19990378655 |
申请日期 |
1999.08.20 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
FUJIMOTO KOJI;KADOTA MICHIO;YONEDA TOSHIMARO |
分类号 |
H01L41/09;H03H3/08;H03H9/02;H03H9/145;H03H9/25;H03H9/64;(IPC1-7):H03H9/25;H01L41/047 |
主分类号 |
H01L41/09 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|