发明名称 Surface acoustic wave resonator, filter, duplexer and communication apparatus
摘要 A surface acoustic wave resonator includes a piezoelectric substrate and an interdigital transducer disposed thereon. The surface acoustic wave resonator operates using a shear horizontal wave, and the interdigital transducer includes an electrode film made of a metal containing W or Ta as its main component and a thin film made of Al.
申请公布号 US6218763(B1) 申请公布日期 2001.04.17
申请号 US19990378655 申请日期 1999.08.20
申请人 MURATA MANUFACTURING CO., LTD. 发明人 FUJIMOTO KOJI;KADOTA MICHIO;YONEDA TOSHIMARO
分类号 H01L41/09;H03H3/08;H03H9/02;H03H9/145;H03H9/25;H03H9/64;(IPC1-7):H03H9/25;H01L41/047 主分类号 H01L41/09
代理机构 代理人
主权项
地址