| 摘要 |
PROBLEM TO BE SOLVED: To prevent generation of dust or the like from a suction pad, and to keep quality of a substrate such as a disk-like record medium or the like high. SOLUTION: This suction device for the substrate has the suction part sucking at least one main surface of the substrate. In the suction part, a surface contacting with the substrate is made of a harder material than the substrate.
|
