发明名称 Method and apparatus for drying washed objects
摘要 A drying apparatus for washed objects is capable of drying the objects in a reduced period of time, effectively preventing contamination of the objects during drying thereof, and attaining energy saving and a reduction in consumption of chemicals used. Mist of an organic solvent is generated by means of an ultrasonic wave in an organic solvent mist generating tank and the objects are immersed in a pure water tank, the pure water tank and organic solvent mist generating tank are then operated to communicate with each other to discharge pure water and place the objects in an atmosphere of the organic solvent mist, and then nitrogen gas is fed to the pure water tank to purge the organic solvent mist with the nitrogen gas.
申请公布号 US6216364(B1) 申请公布日期 2001.04.17
申请号 US19990291860 申请日期 1999.04.14
申请人 KAIJO CORPORATION 发明人 TANAKA AKINORI;OKANO SHOICHI;MAKI ISAO
分类号 H01L21/00;(IPC1-7):F26B3/00 主分类号 H01L21/00
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