CANTILEVER MOUNT FOR ROTATING CYLINDRICAL MAGNETRONS

摘要

An apparatus for rotatably mounting a cylindrical magnetron (10) in a vacuum chamber (12). The apparatus includes a bearing housing (32) having one end extending into the vacuum chamber with t he other end located outside the chamber. A drive shaft (48) is rotatably mounted in the bearing housing. Eaeh end (48a, 48b) of the drive shaft (48) extends beyond the housing (32). The cylindrical magnetron (10) is attached to the end (48b) of the dri ve shaft inside the chamber. A vacuum seal (50) is located in the bearing housing for sealing the drive shaft (48) to the housi ng (32). The drive shaft (48) is mounted in the housing (32) such that the load of the magnetron (10) is not transferred to the vacuum se al (50).