IMPROVED LOW MASS WAFER SUPPORT SYSTEM,申请号KR1020007004778-传众专利搜索

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发明名称	IMPROVED LOW MASS WAFER SUPPORT SYSTEM
摘要
申请公布号	KR20010031715(A)	申请公布日期	2001.04.16
申请号	KR1020007004778	申请日期	2000.05.02
申请人		发明人
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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