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发明名称
UHV-COMPATIBLE IN-SITU PRE-METALLIZATION CLEAN AND METALLIZATION OF SEMICONDUCTOR WAFERS
摘要
申请公布号
KR20010032159(A)
申请公布日期
2001.04.16
申请号
KR1020007005346
申请日期
2000.05.16
申请人
发明人
分类号
H01L21/285
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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