| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater that may reach a desired temperature in a short time with a significant durability and mechanical property such as bending strength. SOLUTION: A ceramic heater includes a resistance heating material consisting of at least one of alumina based composition groups containing W, Re and Mo as the main ingredient and a ceramic material as the remaining. The X-ray diffraction of the alumina based material shows the half value width of 0.1-0.2 deg. for the peak of a surface gap d=0.160 nm. |
