| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature measuring device and a temperature measuring method capable of measuring, directly in a noncontact way with high accuracy, the temperature of a substrate whose temperature is actually required to be grasped. SOLUTION: This temperature measuring device 60 is equipped with fluorescent material 61 applied on the surface of a wafer W whose temperature is to be measured, a light source 62 for irradiating light onto the fluorescent material 61, a detecting circuit 66 for detecting residual light emitted from the fluorescent material 61 after shielding light from the light source 62, and a temperature measuring circuit 67 for calculating the attenuation rate of afterglow based on a detection result of the detecting circuit 66 and for determining the temperature of the substrate based thereon.
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