METHOD FOR GENERATING SEPARATE PLASMA UNIFORMLY APPLIED TO THE WORK SURFACE AND APPARATUS THEREFOR

摘要

PROBLEM TO BE SOLVED: To produce plasma uniformly applied to a work surface of a relatively large size. SOLUTION: An apparatus for generating at least one magnetic field surface having a strength constant and corresponding to an electron cyclotron resonance comprises a part connected to a microwave energy source E, and a part fixedly attached to at least one magnetic dipole 5. A series of separate plasma generation devices respectively consist of a wire applicator 4 of microwave energy. The separate plasma generation devices are distributed near each other to form a plasma diffusion region Z uniformly spread near the work surface Su.