| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable inspection equipment for high frequency circuit having high durability which can operate stably with high accuracy and reproducibility even for a high frequency signal. SOLUTION: A probe 3 for RF signal, a probe 4 for power supply, and a probe 5 for earth are provided, such that the forward end part of a movable pin 11 projects, at the parts on one side of a metal block 1 corresponding to the electrode terminals 21-24 of an object 20 being inspected. With regard to the probe 3 for RF signal and the probe 4 for power supply, periphery of a metal pipe 13 being connected electrically with the movable pin 11 is buried in the metal block 1 while being covered with insulators 15, 16. On the other side of the metal block 1, a wiring board 6 on which power supply terminals are formed is secured so that power can be supplied at least to the probe 4 for power supply. A coaxial cable 7 for inputting/outputting RF signal is connected to the other end side of the probe 3 for RF signal.
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