发明名称 METHOD AND DEVICE FOR FORMING PASTE FILM
摘要 PROBLEM TO BE SOLVED: To provide a method and a device for forming a paste film for quickly forming a paste film with high precision and high reliability without necessitating highly precise mounting adjustment in a viscous substance film forming device. SOLUTION: The inclination and thickness of a paste film is measured by film thickness measuring equipment 51, and an actuator is driven based on the result so that a gap or parallelism between a plate 11 and a blade 12 can be changed. Thus, it is possible to automatically form a paste film having the necessary thickness and inclination.
申请公布号 JP2001102412(A) 申请公布日期 2001.04.13
申请号 JP19990278911 申请日期 1999.09.30
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 TAKAHASHI KENJI;KANAYAMA SHINJI;KIYOMURA HIROYUKI;NASU HIROSHI;MATSUMURA SHINYA
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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