发明名称 |
METHOD AND DEVICE FOR FORMING PASTE FILM |
摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for forming a paste film for quickly forming a paste film with high precision and high reliability without necessitating highly precise mounting adjustment in a viscous substance film forming device. SOLUTION: The inclination and thickness of a paste film is measured by film thickness measuring equipment 51, and an actuator is driven based on the result so that a gap or parallelism between a plate 11 and a blade 12 can be changed. Thus, it is possible to automatically form a paste film having the necessary thickness and inclination.
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申请公布号 |
JP2001102412(A) |
申请公布日期 |
2001.04.13 |
申请号 |
JP19990278911 |
申请日期 |
1999.09.30 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
TAKAHASHI KENJI;KANAYAMA SHINJI;KIYOMURA HIROYUKI;NASU HIROSHI;MATSUMURA SHINYA |
分类号 |
H01L21/60;(IPC1-7):H01L21/60 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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