| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-reliability probe card which allows the probe to be changed, if the probe fails. SOLUTION: The probe card comprises probes 100 contacted to electrodes 910 of a semiconductor integrated circuit 900 of an object to be measured such as LSI chips, etc., a board 200 having wiring patterns (not shown), a means 300 provided on the backside of the board 200 for supporting the probes 100, and a microconnector 400 to be a means for electrically connecting the probes 100 to the wiring pattern, and the probe 100 has an elastic part 130 formed like a flat plate between a rear end connection 120 and a top end contact 110.
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