| 摘要 |
PROBLEM TO BE SOLVED: To precisely reciprocate an optical element by using a parallel link mechanism for an optical element fine movement mechanism which reciprocates the optical element arranged in an optical-axis orthogonal plane by a fine distance in an optical-axis orthogonal direction. SOLUTION: The optical element fine movement mechanism 10 which reciprocates the optical element 2 vertically by a fine distance in a perpendicular plane crossing an optical axis Ax at right angles is equipped with a movable frame 12 which supports the optical element 2, a fixed frame 14 which supports the movable frame 12 in a reciprocating state, and a piezoelectric element 16 which reciprocates the movable frame 12 to and away from the fixed frame 14. In this case, the movable frame 12 is supported by the fixed frame 14 through a couple of parallel link members 18 provided between both side parts of the movable frame 12 and the fixed frame 14. Consequently, a backlash that a conventional fine movement mechanism which has a movable frame supported by a fixed frame through a slider mechanism has is removed to eliminate play in reciprocation.
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