| 摘要 |
<p>A method for improving the performance of a micromachined device, preferably an angular rate microsensor (10), is provided. The method includes collecting data on rate bias over a selected operating phase demodulation angles for at least one tine of a microsensor and determining optimum settings for phase demodulation angles at which the rate bias hysteresis over temperature is at a minimum by applying dynamic programming.</p> |
