Arrangement for cleaning disc-shaped substrates has brushes movable out of brush chamber into process chamber and back again on carriage with toothed belt or spindle drive

摘要

The arrangement has brushes (14,16) arranged in a brush housing (10) and a process chamber in which the substrate is arranged and which is connected to a brush chamber (12) of the brush housing. Both brushes can be moved out of the brush chamber into the process chamber and back again on a carriage (22) with a toothed belt or spindle drive.